About us

Qingdao Huaqi Technology Co., Ltd. is a professional R&D and manufacturing manufacturer of semiconductor process equipment and advanced materials. Dedicated to providing advanced special equipment for semiconductor integrated circuit discrete devices, solar cells, semiconductor lighting LEDs and magnetic materials manufacturers, process cover compound semiconductor crystal growth, epitaxy, thin film deposition (silicon nitride, silicon oxide, polysilicon, etc.), Oxidation diffusion annealing (including rapid annealing process) alloy, vacuum sintering and other processes. The semiconductor process equipment manufactured by our company covers one, two and three generations of semiconductor materials - silicon, gallium arsenide, gallium nitride, etc., high-performance magnetic material vacuum equipment (samarium cobalt, neodymium iron boron, etc.), and also undertakes some national 863 Projects (such as HVPE equipment for semiconductor white light illumination GaN growth, etc.). Huaqi Technology has more than ten years of professional R&D and manufacturing experience. Its products and services are widely used in research institutes, semiconductor manufacturing, and high-performance magnetic materials manufacturing factories in the industry. Huaqi Technology has excellent research, design, manufacturing and service teams. It has undertaken and successfully completed the design of special equipment for a series of national key projects for China Electronics Special Equipment Association, China Magnetic Materials and Devices Association and other association members. Manufacturing.


In 2008, it passed the GB/T19001-200 (ISO9001:2000) quality management system certification. 
Huaqi Technology will continue to improve and improve, and sincerely provide users with better quality, high reliability products and perfect service! 
Main products: solar cell special equipment, solar cell diffusion furnace, solar cell PEVD, oxidation diffusion furnace series, chemical vapor deposition (LPCVD, PECVD), epitaxy and crystal growth (HVPE, MOCVD and VB, VGF, etc.), RTP fast Heat treatment, gas cylinder cabinet / special gas cabinet / gas source cabinet, exhaust gas treatment (SCRUBBER), vacuum heat treatment furnace (dual chamber gas quenching, single chamber, traditional tube furnace, etc.), chain furnace series, diffusion furnace series, two Secondary piping and so on. 
The quality standards and technical grades of the products: close to the standards that exceed the international advanced products! 
Huaqi Technology will continue to improve talents, management, technology, and cooperate with friends from all walks of life at home and abroad to establish a sincere and mutually beneficial cooperation alliance, to provide customers with better products, better services, and to internationalization, modern enterprise strides go ahead.